Questions & Answers
Q: Online TOC of our UPW is 0.5 ppb. Where does it come from? For new FAB we target 0.1 ppb and we need this information for plant design.

A: All DOC (0.5 ppb) is from raw water and is classified as ”building blocks”. The anion filters (separate or part of MB) need better regeneration to prevent permanent release of building blocks.

Q: We want to reclaim a production water. It should only contain IPA and ammonium, right?

A: Apart from IPA (1455 ppb C) and ammonium (45 ppb N) the water also contains traces of high-molecular weight biopolymers (45 ppb) which may reflect a bacterial issue.

1 2 3
You are here: Home > Application examples > Semiconductor